Overview
GammaTrack is a family of impedance matching networks designed for semiconductor fabrication equipment and industrial plasma applications where repeatable matching behavior, fast response, and robustness are essential.
Key capabilities
- Manual and Automatic: Available in lower-cost manual-only mode, or with integrated automatic tuning for fully automated impedance matching.
- Precision Actuation: High-performance stepper motors deliver femtofarad-level capacitance step resolution for fine-grained tuning accuracy.
- Advanced DSP & Tuning: Proprietary digital signal processing and tuning algorithms deliver fast, stable, plug-and-play matching — engineered for reliable operation across a wide range of plasma process conditions.
- Integrated Sensing: Automatic configurations integrate our proprietary SensVI™ probe for real-time RF telemetry and closed-loop control.
- Flexible Communications: Standard serial CLI over FS USB, with options for Analog/Digital IO, EtherCAT, DeviceNet, or Modbus TCP.
Typical applications
- Plasma etch and deposition chambers
- Chamber clean and abatement RF chains
- Remote plasma sources
- Atmospheric plasma sources
- RF welding and sealing
- RF-excited laser systems
- Industrial RF heating and plasma processing
- R&D tool development and retrofit programs
To quote the right unit
For the fastest turnaround, share:
- Target power and frequency range
- Control/interface expectations
- Mechanical envelope, connectors, and cooling constraints
- Any pulsing/synchronization requirements
We can provide a datasheet and integration guidance upon request.